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Touch SF6/N2/CF4 gas mixtures SUDAN

Touch SF6/N2/CF4 gas mixtures SUDAN

Chemistry studies of SF6/CF4, SF6/O2 and CF4/O2 gas phase.Aug 01, 2014· In this work, the mass spectrometry technique was used to verify the main neutral species formed during SF 6 and/or CF 4 HCRIE plasmas and their separately mixtures with O 2. Fig. 2a–c shows the mass spectrum of SF 6 /CF 4, SF 6 /O 2 and CF 4 /O 2 plasmas generated in a concentration proportion of 1:1, respectively. In all mass spectra were observed the formation of HF + (20 amu, Cited by: 10

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